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| Specification | Value |
| Transmission Band 1 | No short-wavelength transmission |
| Transmission Band 2 | Tavg > 25% 233.3 – 239.3 nm |
| Transmission Band 3 | Tavg > 60% 248.9 – 278.0 nm |
| Blocking Band 1 | ODabs > 4 229 nm |
| Blocking Band 2 | ODabs > 4 244 nm |
| Specification | Value |
| Laser Wavelength 1 | 229 nm |
| Laser Wavelength 2 | 244 nm |
| Angle of Incidence | 0 ± 5 degrees |
| Cone Half-angle | 5 degrees |
| Optical Damage Rating | 1 J/cm2 @ 532 nm (10 ns pulse width) |
| Effective Index | 2.25 |
| Specification | Value |
| Transverse Dimensions (Diameter) | 25 mm |
| Transverse Tolerance (mounted) | + 0.0 / – 0.1 mm |
| Filter Thickness (Mounted) | 3.5 mm |
| Filter Thickness Tolerance (Mounted) | ± 0.1 mm |
| Clear Aperture | ≥ 22 mm |
| Scratch-Dig | 60-40 |
| Substrate Type | Fused Silica |
| Substrate Thickness (unmounted) | 2.0 mm |
| Substrate Thickness Tolerance (unmounted) | ± 0.1 mm |
| Orientation | Arrow on ring indicates preferred direction of propagation of light |

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